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Vapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?

dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHuber, A.
dc.contributor.authorOnsia, Bart
dc.contributor.authorArnauts, Sophia
dc.contributor.authorKenis, Karine
dc.contributor.authorKnotter, D. M.
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T11:40:45Z
dc.date.available2021-09-30T11:40:45Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2487
dc.sourceIIOimport
dc.titleVapor phase decomposition - droplet collection. Can we improve the collection efficiency for copper contamination?
dc.typeOral presentation
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorOnsia, Bart
dc.contributor.imecauthorArnauts, Sophia
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conference4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate21/09/1998
dc.source.conferencelocationOostende Belgium
imec.availabilityPublished - imec
imec.internalnotesPubl. in 1999; Zie C3315


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