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Impact of organic contamination on thin gate oxide quality
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Authors
De Gendt, Stefan
;
Knotter, D. M.
;
Kenis, Karine
;
Depas, Michel
;
Meuris, Marc
;
Mertens, Paul
;
Heyns, Marc
Issue
9A
Journal
Japanese Journal of Applied Physics. Part 1: Regular Papers
Volume
37
Title
Impact of organic contamination on thin gate oxide quality
Publication type
Journal article
Embargo date
9999-12-31
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