Show simple item record

Impact of organic contamination on thin gate oxide quality

dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKnotter, D. M.
dc.contributor.authorKenis, Karine
dc.contributor.authorDepas, Michel
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T11:40:57Z
dc.date.available2021-09-30T11:40:57Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2488
dc.sourceIIOimport
dc.titleImpact of organic contamination on thin gate oxide quality
dc.typeJournal article
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage4649
dc.source.endpage4655
dc.source.journalJapanese Journal of Applied Physics. Part 1: Regular Papers
dc.source.issue9A
dc.source.volume37
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
2821.pdf
Size:
1.206Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record