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Strained SiGe layers growth with digermane/disilane recursors combination

dc.contributor.authorZyulkov, Ivan
dc.contributor.authorHikavyy, Andriy
dc.date.accessioned2021-10-22T09:03:58Z
dc.date.available2021-10-22T09:03:58Z
dc.date.issued2014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24901
dc.sourceIIOimport
dc.titleStrained SiGe layers growth with digermane/disilane recursors combination
dc.typeMeeting abstract
dc.contributor.imecauthorZyulkov, Ivan
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.source.peerreviewno
dc.source.beginpage49
dc.source.endpage49
dc.source.conferenceSilicon 2014
dc.source.conferencedate7/07/2014
dc.source.conferencelocationIrkutsk Russia
dc.identifier.urlhttp://www.igc.irk.ru/ConfSi-2014/Tezis/Abstracts_of_the_Conference_Silicon-2014.pdf
imec.availabilityPublished - imec


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