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Impact of organic contamination on gate oxide integrity

dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorKnotter, Martin
dc.contributor.authorKenis, Karine
dc.contributor.authorDepas, Michel
dc.contributor.authorMeuris, Marc
dc.contributor.authorMertens, Paul
dc.contributor.authorHeyns, Marc
dc.date.accessioned2021-09-30T11:41:19Z
dc.date.available2021-09-30T11:41:19Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2490
dc.sourceIIOimport
dc.titleImpact of organic contamination on gate oxide integrity
dc.typeProceedings paper
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorKenis, Karine
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage87
dc.source.endpage93
dc.source.conference44th Annual Meeting of Inst. Environmental Science and Technology
dc.source.conferencedate26/04/1998
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - open access
imec.internalnotesICCCS 14th International Symposium on Contamination Control


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