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Alternative metals for advanced interconnects

dc.contributor.authorAdelmann, Christoph
dc.contributor.authorWen, Liang Gong
dc.contributor.authorDutta, Shibesh
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-22T18:29:51Z
dc.date.available2021-10-22T18:29:51Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24915
dc.sourceIIOimport
dc.titleAlternative metals for advanced interconnects
dc.typeOral presentation
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.source.peerreviewno
dc.source.conferenceSEMI Strategic Materials Conference
dc.source.conferencedate22/09/2015
dc.source.conferencelocationMountain View, CA USA
imec.availabilityPublished - imec


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