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Optimum ArFi laser bandwidth for10nm node logic imaging performance

dc.contributor.authorAlagna, Paolo
dc.contributor.authorZurita, Omar
dc.contributor.authorTimoshkov, Vadim
dc.contributor.authorWong, Patrick
dc.contributor.authorRechtsteiner, Gregory
dc.contributor.authorBaselmans, Jan
dc.contributor.authorMailfert, Julien
dc.date.accessioned2021-10-22T18:30:15Z
dc.date.available2021-10-22T18:30:15Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24931
dc.sourceIIOimport
dc.titleOptimum ArFi laser bandwidth for10nm node logic imaging performance
dc.typeProceedings paper
dc.contributor.imecauthorAlagna, Paolo
dc.contributor.imecauthorWong, Patrick
dc.contributor.imecauthorMailfert, Julien
dc.contributor.orcidimecWong, Patrick::0000-0003-3605-9680
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage942609
dc.source.conferenceOptical Microlithography XXVIII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210056
imec.availabilityPublished - open access
imec.internalnotesProceedings of SPIE; Vol. 9426


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