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Engineered combinations of inorganic ALD/CVD layers and monomolecular organic films

dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-22T18:30:35Z
dc.date.available2021-10-22T18:30:35Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24940
dc.sourceIIOimport
dc.titleEngineered combinations of inorganic ALD/CVD layers and monomolecular organic films
dc.typeMeeting abstract
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage985
dc.source.conference228th ECS Meeting Symposium: Atomic Layer Deposition Applications 11
dc.source.conferencedate11/10/2015
dc.source.conferencelocationPhoenix, AZ US
dc.identifier.urlhttps://ecs.confex.com/ecs/228/webprogram/Paper59308.html
imec.availabilityPublished - imec


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