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Variability of quadruple-patterning interconnect processes

dc.contributor.authorBaert, Rogier
dc.contributor.authorCiofi, Ivan
dc.contributor.authorWilson, Chris
dc.contributor.authorVega Gonzalez, Victor
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.contributor.authorRyckaert, Julien
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorVerkest, Diederik
dc.date.accessioned2021-10-22T18:31:01Z
dc.date.available2021-10-22T18:31:01Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24951
dc.sourceIIOimport
dc.titleVariability of quadruple-patterning interconnect processes
dc.typeProceedings paper
dc.contributor.imecauthorBaert, Rogier
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorVega Gonzalez, Victor
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage135
dc.source.endpage138
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC / Materials for Advanced Metallization Conference - MAM
dc.source.conferencedate18/05/2015
dc.source.conferencelocationGrenoble France
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325645
imec.availabilityPublished - imec


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