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Ultralow-k insulating materials for 10-nm technology node and beyond

dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-22T18:31:25Z
dc.date.available2021-10-22T18:31:25Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24961
dc.sourceIIOimport
dc.titleUltralow-k insulating materials for 10-nm technology node and beyond
dc.typeMeeting abstract
dc.source.peerreviewyes
dc.source.conference46th IEEE Semiconductor Interface Specialists Conference
dc.source.conferencedate2/12/2015
dc.source.conferencelocationArlington, VA USA
dc.identifier.urlhttp://www.ieeesisc.org/program.html
imec.availabilityPublished - imec


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