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Surface redeposition and damage due to focused ion beam milling

dc.contributor.authorBender, Hugo
dc.contributor.authorFranquet, Alexis
dc.contributor.authorDrijbooms, Chris
dc.contributor.authorParmentier, Brigitte
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorKwakman, Laurens
dc.date.accessioned2021-10-22T18:32:48Z
dc.date.available2021-10-22T18:32:48Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24984
dc.sourceIIOimport
dc.titleSurface redeposition and damage due to focused ion beam milling
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDrijbooms, Chris
dc.contributor.imecauthorParmentier, Brigitte
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceESREF European FIB Users Group Workshop - EFUB
dc.source.conferencedate8/10/2015
dc.source.conferencelocationToulouse France
imec.availabilityPublished - open access


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