dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Franquet, Alexis | |
dc.contributor.author | Drijbooms, Chris | |
dc.contributor.author | Parmentier, Brigitte | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Kwakman, Laurens | |
dc.date.accessioned | 2021-10-22T18:32:48Z | |
dc.date.available | 2021-10-22T18:32:48Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/24984 | |
dc.source | IIOimport | |
dc.title | Surface redeposition and damage due to focused ion beam milling | |
dc.type | Oral presentation | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Franquet, Alexis | |
dc.contributor.imecauthor | Drijbooms, Chris | |
dc.contributor.imecauthor | Parmentier, Brigitte | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.orcidimec | Franquet, Alexis::0000-0002-7371-8852 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.conference | ESREF European FIB Users Group Workshop - EFUB | |
dc.source.conferencedate | 8/10/2015 | |
dc.source.conferencelocation | Toulouse France | |
imec.availability | Published - open access | |