Authors

Bhonsle, Rithu; Teugels, Lieve; Usman Ibrahim, Ansar; Ong, Patrick; Delande, Tinne; Krishnan, S; Siebert, Max; Struyf, Herbert; Leunissen, Leonardus

ISSN

2162-8769

Issue

11

Journal

ECS Journal of Solid State Science and Technology

Volume

4

Title

Inspection, characterization and classification of defects for improved CMP of III-V materials

Publication type

Journal article