Publication:

Inspection, characterization and classification of defects for improved CMP of III-V materials

Date

2015

Journal article

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Author(s)

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Usman Ibrahim, Ansar

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Struyf, Herbert

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Leunissen, Leonardus

Journal

ECS Journal of Solid State Science and Technology

Metrics

1937 since deposited on 2021-10-22

1last month

Acq. date: 2025-12-14