Publication:

Inspection, characterization and classification of defects for improved CMP of III-V materials

Date

2015
Journal article
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Author(s)

Bhonsle, Rithu
;
Teugels, Lieve  
;
Usman Ibrahim, Ansar  
;
Ong, Patrick  
;
Delande, Tinne  
;
Krishnan, S
;
Siebert, Max
;
Struyf, Herbert  
;
Leunissen, Leonardus

Journal

ECS Journal of Solid State Science and Technology

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1941 since deposited on 2021-10-22
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1941 since deposited on 2021-10-22
4last month
Acq. date: 2026-02-24

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