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Inspection, characterization and classification of defects for improved CMP of III-V materials

dc.contributor.authorBhonsle, Rithu
dc.contributor.authorTeugels, Lieve
dc.contributor.authorUsman Ibrahim, Ansar
dc.contributor.authorOng, Patrick
dc.contributor.authorDelande, Tinne
dc.contributor.authorKrishnan, S
dc.contributor.authorSiebert, Max
dc.contributor.authorStruyf, Herbert
dc.contributor.authorLeunissen, Leonardus
dc.date.accessioned2021-10-22T18:33:19Z
dc.date.available2021-10-22T18:33:19Z
dc.date.issued2015
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24992
dc.sourceIIOimport
dc.titleInspection, characterization and classification of defects for improved CMP of III-V materials
dc.typeJournal article
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorUsman Ibrahim, Ansar
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.source.peerreviewyes
dc.source.beginpage5073
dc.source.endpage5077
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue11
dc.source.volume4
dc.identifier.urlhttp://jss.ecsdl.org/content/4/11/P5073/F3.expansion.html
imec.availabilityPublished - imec


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