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Statistical analysis of gate oxide integrity test

dc.contributor.authorMertens, Paul
dc.contributor.authorVermeire, Bert
dc.contributor.authorDepas, Michel
dc.contributor.authorMeuris, Marc
dc.contributor.authorHeyns, Marc
dc.contributor.authorGräf, D.
dc.date.accessioned2021-09-29T12:43:39Z
dc.date.available2021-09-29T12:43:39Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/249
dc.sourceIIOimport
dc.titleStatistical analysis of gate oxide integrity test
dc.typeProceedings paper
dc.contributor.imecauthorMertens, Paul
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage350
dc.source.conferenceProceedings of the Institute of Environmental Science: 40th Annual Technical Meeting
dc.source.conferencedate01/05/1994
dc.source.conferencelocationChicago, IL USA
imec.availabilityPublished - open access


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