Publication:
Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
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1924 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-25
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Statistics
Views
1924 since deposited on 2021-10-22
1last month
Acq. date: 2026-01-25
Citations