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Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
Publication:
Towards directed self-assembly for future CMOS scaling: A study on variability of cylindrical patterns
Date
2015
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Boeckx, Carolien
;
Doise, Jan
;
Fenger, Germain
;
Cao, Yi
;
Gronheid, Roel
;
De Gendt, Stefan
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1921
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations
Metrics
Views
1921
since deposited on 2021-10-22
Acq. date: 2025-10-23
Citations