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MOVPE In1-xGaxAs high mobility channel for 3-D NAND memory

dc.contributor.authorCapogreco, Elena
dc.contributor.authorLisoni, Judit
dc.contributor.authorArreghini, Antonio
dc.contributor.authorSubirats, Alexandre
dc.contributor.authorKunert, Bernardette
dc.contributor.authorGuo, Weiming
dc.contributor.authorMaurice, Thibaut
dc.contributor.authorTan, Chi Lim
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorVan Houdt, Jan
dc.date.accessioned2021-10-22T18:36:50Z
dc.date.available2021-10-22T18:36:50Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25033
dc.sourceIIOimport
dc.titleMOVPE In1-xGaxAs high mobility channel for 3-D NAND memory
dc.typeProceedings paper
dc.contributor.imecauthorCapogreco, Elena
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorKunert, Bernardette
dc.contributor.imecauthorMaurice, Thibaut
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecKunert, Bernardette::0000-0002-8986-4109
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage40
dc.source.endpage43
dc.source.conferenceInternational Electron Devices Meeting - IEDM
dc.source.conferencedate7/12/2015
dc.source.conferencelocationWashington, D.C. USA
imec.availabilityPublished - open access


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