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Multilayer motherboard technology in MCM-Si with opto-electronic features

dc.contributor.authorDe Pauw, Herbert
dc.contributor.authorDe Smet, Herbert
dc.contributor.authorVanfleteren, Jan
dc.contributor.authorLernout, Jo
dc.contributor.authorVan Calster, Andre
dc.date.accessioned2021-09-30T11:43:33Z
dc.date.available2021-09-30T11:43:33Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2503
dc.sourceIIOimport
dc.titleMultilayer motherboard technology in MCM-Si with opto-electronic features
dc.typeProceedings paper
dc.contributor.imecauthorDe Pauw, Herbert
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.imecauthorVanfleteren, Jan
dc.contributor.imecauthorVan Calster, Andre
dc.contributor.orcidimecVanfleteren, Jan::0000-0002-9654-7304
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage347
dc.source.endpage352
dc.source.conferenceProceedings of the IMAPS International Symposium on Microelectronics
dc.source.conferencedate1/11/1998
dc.source.conferencelocationSan Diego, CA USA
imec.availabilityPublished - open access


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