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dc.contributor.authorCelano, Umberto
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T18:37:55Z
dc.date.available2021-10-22T18:37:55Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25044
dc.sourceIIOimport
dc.titleScanning probe tomography for the 3D-observation of conduction paths in advanced memory devices
dc.typeOral presentation
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.source.peerreviewno
dc.source.conferenceMaterial Reserach Society (MRS) Spring Meeting Symposium AA: Materials for Beyond the Roadmap Devices in Logic, Power and Memory
dc.source.conferencedate6/04/2015
dc.source.conferencelocationSan Francisco, CA USA
dc.identifier.urlhttps://mrsspring.zerista.com/profile/member/774977
imec.availabilityPublished - imec


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