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Scanning probe tomography toward the three-dimensional characterization of confined volumes

dc.contributor.authorCelano, Umberto
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T18:38:00Z
dc.date.available2021-10-22T18:38:00Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25045
dc.sourceIIOimport
dc.titleScanning probe tomography toward the three-dimensional characterization of confined volumes
dc.typeProceedings paper
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceNano Italy
dc.source.conferencedate21/09/2015
dc.source.conferencelocationRome Italy
dc.identifier.urlhttp://www.nanoitaly.it/nanoitaly/en/home-eng/12-abstract-ita/318-ts-v-4-3
imec.availabilityPublished - open access


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