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Influence of porosity on VUV induced damage to low-k dielectrics

dc.contributor.authorChoudhury, F.
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorKing, S.
dc.contributor.authorNishi, Y.
dc.contributor.authorShohet, J.
dc.date.accessioned2021-10-22T18:42:04Z
dc.date.available2021-10-22T18:42:04Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25080
dc.sourceIIOimport
dc.titleInfluence of porosity on VUV induced damage to low-k dielectrics
dc.typeMeeting abstract
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.source.peerreviewyes
dc.source.conferenceAVD 62nd International Symposium & Exhibition
dc.source.conferencedate18/10/2015
dc.source.conferencelocationSan Jose, CA USA
imec.availabilityPublished - imec


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