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Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry

dc.contributor.authorClemmen, Stephane
dc.contributor.authorHermans, Artur
dc.contributor.authorSolano, Eduardo
dc.contributor.authorDendooven, Jolien
dc.contributor.authorKoskinen, Kalle
dc.contributor.authorKauranen, Marti
dc.contributor.authorBrainis, Edouard
dc.contributor.authorDetavernier, Christophe
dc.contributor.authorBaets, Roel
dc.date.accessioned2021-10-22T18:42:52Z
dc.date.available2021-10-22T18:42:52Z
dc.date.issued2015-11
dc.identifier.issn0146-9592
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25086
dc.sourceIIOimport
dc.titleAtomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry
dc.typeJournal article
dc.contributor.imecauthorClemmen, Stephane
dc.contributor.imecauthorHermans, Artur
dc.contributor.imecauthorBaets, Roel
dc.contributor.orcidimecClemmen, Stephane::0000-0003-0192-4662
dc.contributor.orcidimecHermans, Artur::0000-0003-2911-7125
dc.contributor.orcidimecBaets, Roel::0000-0003-1266-1319
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage5371
dc.source.endpage5374
dc.source.journalOptics Letters
dc.source.issue22
dc.source.volume40
dc.identifier.urlhttps://www.osapublishing.org/ol/abstract.cfm?uri=ol-40-22-5371
imec.availabilityPublished - open access


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