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Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry
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Authors
Clemmen, Stephane
;
Hermans, Artur
;
Solano, Eduardo
;
Dendooven, Jolien
;
Koskinen, Kalle
;
Kauranen, Marti
;
Brainis, Edouard
;
Detavernier, Christophe
;
Baets, Roel
ISSN
0146-9592
Issue
22
Journal
Optics Letters
Volume
40
Title
Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry
Publication type
Journal article
Embargo date
9999-12-31
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