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Atomic layer deposited second-order nonlinear optical metamaterial for back-end integration with CMOS-compatible nanophotonic circuitry
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1978 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-08
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Metrics
Views
1978 since deposited on 2021-10-22
1last month
Acq. date: 2025-12-08
Citations