Authors

Conard, Thierry; Fleischmann, Claudia; Havelund, Rasmus; Franquet, Alexis; Poleunis, Claude; Delcorte, Arnaud; Vandervorst, Wilfried

Conference

SIMS XX

Title

High quality profiles for inorganic material using Arn+ clusters: a must for hybrid system profiling and how to achieve them

Publication type

Meeting abstract