Intrinisic reliability of local interconnects for N7 and beyond

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Authors
Croes, Kristof; Lesniewska, Alicja; Wu, Chen; Ciofi, Ivan; Banczerowska, Aga; Briggs, Basoene; Demuynck, Steven; Tokei, Zsolt; Boemmels, Juergen; Saad, Y.; Gao, Weimin
Conference
IEEE International Reliability Physics Symposium - IRPS
Title
Intrinisic reliability of local interconnects for N7 and beyond
Publication type
Proceedings paper
Embargo date
9999-12-31
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