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Modeling of bombardment induced oxidation of silicon with and without oxygen flooding

dc.contributor.authorDe Witte, Hilde
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorGijbels, Renaat
dc.date.accessioned2021-09-30T11:44:59Z
dc.date.available2021-09-30T11:44:59Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2511
dc.sourceIIOimport
dc.titleModeling of bombardment induced oxidation of silicon with and without oxygen flooding
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage327
dc.source.endpage330
dc.source.conferenceSIMS XI - Secondary Ion Mass Spectrometry
dc.source.conferencedate8/09/1997
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - open access


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