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Impact of oxide liner properties on TSV Cu pumping and TSV stress

dc.contributor.authorDe Messemaeker, Joke
dc.contributor.authorVarela Pedreira, Olalla
dc.contributor.authorMoussa, Alain
dc.contributor.authorNabiollahi, Nabi
dc.contributor.authorVanstreels, Kris
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorPhilipsen, Harold
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVandevelde, Bart
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorBeyne, Eric
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-22T18:51:02Z
dc.date.available2021-10-22T18:51:02Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25143
dc.sourceIIOimport
dc.titleImpact of oxide liner properties on TSV Cu pumping and TSV stress
dc.typeProceedings paper
dc.contributor.imecauthorDe Messemaeker, Joke
dc.contributor.imecauthorVarela Pedreira, Olalla
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorPhilipsen, Harold
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVandevelde, Bart
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecPhilipsen, Harold::0000-0002-5029-1104
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVandevelde, Bart::0000-0002-6753-6438
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage4C.5
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate19/04/2015
dc.source.conferencelocationMonterey CA, USA
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7112736
imec.availabilityPublished - imec


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