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Alternative EUV materials. Status at imec

dc.contributor.authorDe Simone, Danilo
dc.date.accessioned2021-10-22T18:52:41Z
dc.date.available2021-10-22T18:52:41Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25154
dc.sourceIIOimport
dc.titleAlternative EUV materials. Status at imec
dc.typeProceedings paper
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.source.peerreviewyes
dc.source.conferenceInternational Symposium on Extreme Ultraviolet Lithography - EUVL. TWG meeting
dc.source.conferencedate4/10/2015
dc.source.conferencelocationMaastricht The Nederlands
imec.availabilityPublished - imec


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