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Cross-sectional nano-spreading resistance profiling
Publication:
Cross-sectional nano-spreading resistance profiling
Date
1998
Journal article
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2312.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Wolf, Peter
;
Clarysse, Trudo
;
Vandervorst, Wilfried
;
Hellemans, L.
;
Niedermann, P.
;
Hänni, W.
Journal
Journal of Vacuum Science and Technology B
Abstract
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1950
since deposited on 2021-09-30
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item.page.metrics.field.last-week
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Citations
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Downloads
2
since deposited on 2021-09-30
1
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Views
1950
since deposited on 2021-09-30
425
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations