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Atomic layer deposition of 2D transition metal dichalogenides

dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorGroven, Benjamin
dc.contributor.authorHeyne, Markus
dc.contributor.authorHaesevoets, Karel
dc.contributor.authorMeersschaut, Johan
dc.contributor.authorNuytten, Thomas
dc.contributor.authorBender, Hugo
dc.contributor.authorConard, Thierry
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorHeyns, Marc
dc.contributor.authorBarla, Kathy
dc.contributor.authorRadu, Iuliana
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T18:57:13Z
dc.date.available2021-10-22T18:57:13Z
dc.date.issued2015-10
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25180
dc.sourceIIOimport
dc.titleAtomic layer deposition of 2D transition metal dichalogenides
dc.typeProceedings paper
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorHaesevoets, Karel
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBarla, Kathy
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.source.peerreviewno
dc.source.beginpage16
dc.source.endpage17
dc.source.conferenceInternational Workshop 'Atomic Layer Deposition: Russia 2015'
dc.source.conferencedate21/09/2015
dc.source.conferencelocationMoscow Russia
imec.availabilityPublished - imec


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