dc.contributor.author | Detalle, Mikael | |
dc.contributor.author | Vandevelde, Bart | |
dc.contributor.author | Nolmans, Philip | |
dc.contributor.author | Miller, Andy | |
dc.contributor.author | La Manna, Antonio | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Beyne, Eric | |
dc.date.accessioned | 2021-10-22T19:00:31Z | |
dc.date.available | 2021-10-22T19:00:31Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25197 | |
dc.source | IIOimport | |
dc.title | Stress and bowing engineering in passive silicon interposer | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | Detalle, Mikael | |
dc.contributor.imecauthor | Vandevelde, Bart | |
dc.contributor.imecauthor | Nolmans, Philip | |
dc.contributor.imecauthor | Miller, Andy | |
dc.contributor.imecauthor | La Manna, Antonio | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.orcidimec | Vandevelde, Bart::0000-0002-6753-6438 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 287 | |
dc.source.endpage | 292 | |
dc.source.conference | IEEE 65th Electronic Components and Technology Conference - ECTC | |
dc.source.conferencedate | 26/05/2015 | |
dc.source.conferencelocation | San Diego, CA USA | |
dc.identifier.url | http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7159606 | |
imec.availability | Published - open access | |