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Influence of film thickness and pattern density in graphoepitaxial DSA

dc.contributor.authorDoise, Jan
dc.contributor.authorBekaert, Joost
dc.contributor.authorChan, BT
dc.contributor.authorLin, Guanyang
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T19:04:37Z
dc.date.available2021-10-22T19:04:37Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25219
dc.sourceIIOimport
dc.titleInfluence of film thickness and pattern density in graphoepitaxial DSA
dc.typeProceedings paper
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conference1st International Conference on DSA
dc.source.conferencedate26/10/2015
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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