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Grazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings

dc.contributor.authorDoxastakis, Manolis
dc.contributor.authorSuh, Hyo Seon
dc.contributor.authorChen, Xuanxuan
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorWan, Lingshu
dc.contributor.authorWilliamson, Lance
dc.contributor.authorJiang, Zhang
dc.contributor.authorStrzalka, Joseph
dc.contributor.authorWang, Jin
dc.contributor.authorChen, Wei
dc.contributor.authorFerrier, Nicola
dc.contributor.authorRamirez-Hernandez, Abelardo
dc.contributor.authorde Pablo, Juan
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.date.accessioned2021-10-22T19:05:35Z
dc.date.available2021-10-22T19:05:35Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25224
dc.sourceIIOimport
dc.titleGrazing-incidence small angle x-ray scattering studies of nanoscale polymer gratings
dc.typeProceedings paper
dc.contributor.imecauthorSuh, Hyo Seon
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewyes
dc.source.beginpage94241N
dc.source.conferenceMetrology, Inspection, and Process Control for Microlithography XXIX
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210992
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9424


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