dc.contributor.author | El Otell, Ziad | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.date.accessioned | 2021-10-22T19:10:20Z | |
dc.date.available | 2021-10-22T19:10:20Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25248 | |
dc.source | IIOimport | |
dc.title | Vacuum ultra-violet emission of plasmas and their effect on etched materials | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | El Otell, Ziad | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.source.peerreview | yes | |
dc.source.conference | 2nd SNM Workshop @ EVG in Austria | |
dc.source.conferencedate | 30/06/2015 | |
dc.source.conferencelocation | St. Florian am Inn Austria | |
imec.availability | Published - imec | |