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Plasma patterning of SIS modified DSA line space patterns into silicon
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Authors
El Otell, Ziad
;
Singh, Arjun
;
Chan, BT
;
Gronheid, Roel
;
de Marneffe, Jean-Francois
Conference
International Micro and Nano Engineering Conference - MNE
Title
Plasma patterning of SIS modified DSA line space patterns into silicon
Publication type
Meeting abstract
Embargo date
9999-12-31
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