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Sputtering with large On+ cluster projectiles on inorganic surfaces

dc.contributor.authorFleischmann, Claudia
dc.contributor.authorConard, Thierry
dc.contributor.authorFranquet, Alexis
dc.contributor.authorNiehuis, Ewald
dc.contributor.authorRading, Derk
dc.contributor.authorMoellers, Rudolf
dc.contributor.authorPoleunis, Claude
dc.contributor.authorDelcorte, Arnaud
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T19:16:12Z
dc.date.available2021-10-22T19:16:12Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25276
dc.sourceIIOimport
dc.titleSputtering with large On+ cluster projectiles on inorganic surfaces
dc.typeMeeting abstract
dc.contributor.imecauthorFleischmann, Claudia
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFleischmann, Claudia::0000-0003-1531-6916
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.source.peerreviewyes
dc.source.conferenceSIMS XX
dc.source.conferencedate13/09/2015
dc.source.conferencelocationSeattle, WA USA
imec.availabilityPublished - imec


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