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Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulations
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1994 since deposited on 2021-10-22
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Acq. date: 2025-10-25
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Metrics
Views
1994 since deposited on 2021-10-22
420item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations