Authors

Gao, Weimin; Ciofi, Ivan; Saad, Yves; Matagne, Philippe; Bachman, Michael; Oulmane, Mohamed; Gillijns, Werner; Lucas, Kevin; Demmerle, Wolfgang; Schmoeller, Thomas

Conference

Optical Microlithographies XXVIII

Title

Patterning process exploration of metal 1 layer in 7nm node with 3D pattering flow simulations

Publication type

Proceedings paper

Embargo date

9999-12-31