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The effects of surface topography of nanopatterned substrates on the Directed Self Assembly of block copolymers

dc.contributor.authorGarner, Grant
dc.contributor.authorGronheid, Roel
dc.contributor.authorNealey, Paul
dc.contributor.authorde Pablo, Juan
dc.date.accessioned2021-10-22T19:18:42Z
dc.date.available2021-10-22T19:18:42Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25287
dc.sourceIIOimport
dc.titleThe effects of surface topography of nanopatterned substrates on the Directed Self Assembly of block copolymers
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.source.peerreviewno
dc.source.conference1st International Symposium on DSA
dc.source.conferencedate26/10/2015
dc.source.conferencelocationLeuven Belgium
imec.availabilityPublished - imec


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