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Study of the transient phenomena in SIMS depth profiling using combined SIMS-RBS

dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T11:48:23Z
dc.date.available2021-09-30T11:48:23Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2529
dc.sourceIIOimport
dc.titleStudy of the transient phenomena in SIMS depth profiling using combined SIMS-RBS
dc.typeProceedings paper
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage359
dc.source.endpage362
dc.source.conferenceSIMS XI - Secondary Ion Mass Spectrometry
dc.source.conferencedate8/09/1997
dc.source.conferencelocationOrlando, FL USA
imec.availabilityPublished - open access


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