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Transient sputter yields of silicon with and without oxygen flooding

dc.contributor.authorDeleu, Jeroen
dc.contributor.authorBrijs, Bert
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-30T11:48:33Z
dc.date.available2021-09-30T11:48:33Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2530
dc.sourceIIOimport
dc.titleTransient sputter yields of silicon with and without oxygen flooding
dc.typeOral presentation
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference11th Annual SIMS Workshop; 10-13 May 1998; Austin, TX, USA.
dc.source.conferencelocation
imec.availabilityPublished - imec


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