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DSA graphoepitaxy calibrations for contact hole multiplication

dc.contributor.authorGraves, Trey
dc.contributor.authorVaglio Pret, Alessandro
dc.contributor.authorRobertson, Stuart
dc.contributor.authorSmith, Mark
dc.contributor.authorDoise, Jan
dc.contributor.authorBekaert, Joost
dc.contributor.authorGronheid, Roel
dc.date.accessioned2021-10-22T19:30:43Z
dc.date.available2021-10-22T19:30:43Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25338
dc.sourceIIOimport
dc.titleDSA graphoepitaxy calibrations for contact hole multiplication
dc.typeProceedings paper
dc.contributor.imecauthorVaglio Pret, Alessandro
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorGronheid, Roel
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.source.peerreviewyes
dc.source.beginpage94250Y
dc.source.conferenceAdvances in Patterning Materials and Processes XXXII
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2235375&resultClick=1
imec.availabilityPublished - imec
imec.internalnotesProceedings of SPIE; Vol. 9425


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