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Implementation of DSA for electrical test vehicles at the 7 nm node

dc.contributor.authorGronheid, Roel
dc.contributor.authorDoise, Jan
dc.contributor.authorBekaert, Joost
dc.contributor.authorChan, BT
dc.contributor.authorRincon Delgadillo, Paulina
dc.contributor.authorKarageorgos, Ioannis
dc.contributor.authorRyckaert, Julien
dc.contributor.authorVandenberghe, Geert
dc.contributor.authorSayan, Safak
dc.contributor.authorLin, Guanyang
dc.date.accessioned2021-10-22T19:31:32Z
dc.date.available2021-10-22T19:31:32Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25341
dc.sourceIIOimport
dc.titleImplementation of DSA for electrical test vehicles at the 7 nm node
dc.typeProceedings paper
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorDoise, Jan
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorChan, BT
dc.contributor.imecauthorRincon Delgadillo, Paulina
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecChan, BT::0000-0003-2890-0388
dc.source.peerreviewno
dc.source.conferenceE-MRS Spring Meeting
dc.source.conferencedate11/05/2015
dc.source.conferencelocationLille France
imec.availabilityPublished - imec


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