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Nanocrystalline diamond: Membranes and low temperature depostion

dc.contributor.authorHaenen, Ken
dc.contributor.authorDrijkonigen, Sien
dc.contributor.authorJanssens, Stoffel
dc.contributor.authorPobedinskas, Paulius
dc.contributor.authorNesladek, Milos
dc.date.accessioned2021-10-22T19:34:35Z
dc.date.available2021-10-22T19:34:35Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25353
dc.sourceIIOimport
dc.titleNanocrystalline diamond: Membranes and low temperature depostion
dc.typeOral presentation
dc.contributor.imecauthorHaenen, Ken
dc.contributor.imecauthorPobedinskas, Paulius
dc.contributor.imecauthorNesladek, Milos
dc.contributor.orcidimecHaenen, Ken::0000-0001-6711-7367
dc.contributor.orcidimecPobedinskas, Paulius::0000-0001-8136-5172
dc.source.peerreviewno
dc.source.conference3de French-Japanese Workshop on Diamond Power Devices
dc.source.conferencedate7/07/2015
dc.source.conferencelocationNimes France
imec.availabilityPublished - imec


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