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Ozone-based atomic layer deposition of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium: growth characteristics and surface chemistry

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1859 since deposited on 2021-10-22
2last month
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Acq. date: 2026-02-15

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Views

1859 since deposited on 2021-10-22
2last month
1last week
Acq. date: 2026-02-15

Citations