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Ozone-based atomic layer deposition of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium: growth characteristics and surface chemistry
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Authors
Han, Jeong Hwan
;
Delabie, Annelies
;
Franquet, Alexis
;
Conard, Thierry
;
Van Elshocht, Sven
;
Adelmann, Christoph
ISSN
0948-1907
Issue
10_12
Journal
Chemical Vapor Deposition
Volume
21
Title
Ozone-based atomic layer deposition of Gd2O3 from tris(isopropyl-cyclopentadienyl) gadolinium: growth characteristics and surface chemistry
Publication type
Journal article
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