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Diamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization

dc.contributor.authorHantschel, Thomas
dc.contributor.authorXu, Zheng
dc.contributor.authorParedis, Kristof
dc.contributor.authorSchulze, Andreas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-22T19:36:51Z
dc.date.available2021-10-22T19:36:51Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25362
dc.sourceIIOimport
dc.titleDiamond scanning probes with sub-nanometer resolution for advanced nanoelectronics device characterization
dc.typeMeeting abstract
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.source.peerreviewyes
dc.source.conference41st Micro and Nano Engineering Conference
dc.source.conferencedate22/09/2015
dc.source.conferencelocationDen Haag THe Netherlands
dc.identifier.urlhttp://mne2015.org/programme/full-programme/
imec.availabilityPublished - imec


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