Toggle navigation
My submissions
Login
Toggle navigation
View item
imec Publications Repository
imec Publications
Book chapters
View item
imec Publications Repository
imec Publications
Book chapters
View item
JavaScript is disabled for your browser. Some features of this site may not work without it.
Sol-gel deposition of ultrathin high-k dielectric films
Metadata
Show full item record
Authors
Hardy, An
;
Van Bael, Marlies
DOI
10.1002/9783527670819.ch24
Book
The Sol-Gel Handbook
Title
Sol-gel deposition of ultrathin high-k dielectric films
Publication type
Book chapter
Collections
Book chapters
Search imec Publications Repository
This collection
Browse
All of imec Publications Repository
Collections
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
This collection
Publication date
Authors
Titles
Subjects
imec author
Availability
Publication type
My account
login