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Sol-gel deposition of ultrathin high-k dielectric films

dc.contributor.authorHardy, An
dc.contributor.authorVan Bael, Marlies
dc.date.accessioned2021-10-22T19:37:03Z
dc.date.available2021-10-22T19:37:03Z
dc.date.issued2015-09
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25363
dc.sourceIIOimport
dc.titleSol-gel deposition of ultrathin high-k dielectric films
dc.typeBook chapter
dc.contributor.imecauthorHardy, An
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.identifier.doi10.1002/9783527670819.ch24
dc.source.peerreviewno
dc.source.bookThe Sol-Gel Handbook
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/9783527670819.ch24/summary
imec.availabilityPublished - imec


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