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Active-lite interposer for 2.5 & 3D integration

dc.contributor.authorHellings, Geert
dc.contributor.authorScholz, Mirko
dc.contributor.authorDetalle, Mikael
dc.contributor.authorVelenis, Dimitrios
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorRoda Neve, Cesar
dc.contributor.authorLi, Yunlong
dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorChen, Shih-Hung
dc.contributor.authorMarinissen, Erik Jan
dc.contributor.authorLa Manna, Antonio
dc.contributor.authorVan der Plas, Geert
dc.contributor.authorLinten, Dimitri
dc.contributor.authorBeyne, Eric
dc.contributor.authorThean, Aaron
dc.date.accessioned2021-10-22T19:38:21Z
dc.date.available2021-10-22T19:38:21Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25368
dc.sourceIIOimport
dc.titleActive-lite interposer for 2.5 & 3D integration
dc.typeProceedings paper
dc.contributor.imecauthorHellings, Geert
dc.contributor.imecauthorDetalle, Mikael
dc.contributor.imecauthorVelenis, Dimitrios
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorChen, Shih-Hung
dc.contributor.imecauthorMarinissen, Erik Jan
dc.contributor.imecauthorLa Manna, Antonio
dc.contributor.imecauthorVan der Plas, Geert
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorThean, Aaron
dc.contributor.orcidimecHellings, Geert::0000-0002-5376-2119
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecMarinissen, Erik Jan::0000-0002-5058-8303
dc.contributor.orcidimecVan der Plas, Geert::0000-0002-4975-6672
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.source.peerreviewyes
dc.source.beginpageT222
dc.source.endpageT223
dc.source.conferenceIEEE Symposium on VLSI Technology
dc.source.conferencedate16/06/2015
dc.source.conferencelocationKyoto Japan
dc.identifier.urlhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7223647
imec.availabilityPublished - imec


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