dc.contributor.author | Heyne, Markus | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Meersschaut, Johan | |
dc.contributor.author | Nuytten, Thomas | |
dc.contributor.author | Radu, Iuliana | |
dc.contributor.author | Neyts, Erik C. | |
dc.contributor.author | Bogaerts, Annemie | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-22T19:41:43Z | |
dc.date.available | 2021-10-22T19:41:43Z | |
dc.date.issued | 2015 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/25382 | |
dc.source | IIOimport | |
dc.title | Investigations on the plasma-surface interaction during atomic layer etching of thin transition-metal dichalcogenide films | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Meersschaut, Johan | |
dc.contributor.imecauthor | Nuytten, Thomas | |
dc.contributor.imecauthor | Radu, Iuliana | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
dc.contributor.orcidimec | Nuytten, Thomas::0000-0002-5921-6928 | |
dc.contributor.orcidimec | Radu, Iuliana::0000-0002-7230-7218 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.conference | 22nd International Symposium on Plasma Chemistry | |
dc.source.conferencedate | 5/07/2015 | |
dc.source.conferencelocation | Antwerp Belgium | |
imec.availability | Published - imec | |