Authors

Hoenicke, Philipp; Detlefs, Blanka; Fleischmann, Claudia; Vandervorst, Wilfried; Mueller, Matthias; Nolot, Emmanuel; Grampeix, Helen; Beckhoff, Burkhard

Conference

International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN

Title

Reference-free, depth-dependent characterization of nanoscaled materials using a combined grazing incidence X-ray fluorescence and X-ray reflectometry approach

Publication type

Proceedings paper

Embargo date

9999-12-31